Photoelectric conversion apparatus and imaging system using the photoelectric conversion apparatus

A photoelectric conversion apparatus comprising:

• a photoelectric conversion portion including a first semiconductor region of a first conductivity type arranged in a semiconductor substrate;
• a charge holding portion including a second semiconductor region of the first conductivity type arranged in the semiconductor substrate and configured to hold a charge generated by the photoelectric conversion portion;
• a third semiconductor region of the first conductivity type arranged in the semiconductor substrate;
• a first gate electrode arranged on a region between the second semiconductor region and the third semiconductor region and configured to transfer a charge of the second semiconductor region into the third semiconductor region;
• and
• an isolation portion including a first part, a second part and a third part of an insulator, wherein
• the first semiconductor region is arranged between the first part of the insulator and the second semiconductor region in a first cross section including a first direction along which the first semiconductor region and the second semiconductor region are arranged,
• the second semiconductor region is arranged between the second part and the third part of the insulator in a second cross section including a second direction intersecting the first direction, and
• in the second cross section, the second semiconductor region is arranged at a depth shallower than a bottom of the second part and a bottom of the third part of the insulator.