Methods for manufacturing three-dimensional devices and devices created thereby
AssigneeMikro Systems, Inc.
InventorsMichael P. Appleby, Iain Fraser, James E. Atkinson
Life of this patent
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AssigneeMikro Systems, Inc.
InventorsMichael P. Appleby, Iain Fraser, James E. Atkinson
Estimating the term…
In certain exemplary embodiments of the present invention, three-dimensional micro-mechanical devices and/or micro-structures can be made using a production casting process. As part of this process, an intermediate mold can be made from or derived from a precision stack lamination and used to fabricate the devices and/or structures. Further, the micro-devices and/or micro-structures can be fabricated on planar or nonplanar surfaces through use of a series of production casting processes and intermediate molds. The use of precision stack lamination can allow the fabrication of high aspect ratio structures. Moreover, via certain molding and/or casting materials, molds having cavities with protruding undercuts also can be fabricated.
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Dependencies are inferred from the claim text.