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US 9,201,303 B2Granted
Photoresist composition
AssigneeSumitomo Chemical Company, Limited
InventorsMaki Kawamura, Junji Nakanishi
Life of this patent
Estimating the term…
Abstract
A photoresist composition comprising: a resin which shows an increase in solubility in an aqueous alkali solution by an action of an acid; an acid generator; a plasticizer; and a solvent the amount of which is from 40 to 75% by mass of the total amount of the photoresist composition.
Claims6
A photoresist composition comprising:
- a resin which shows an increase in solubility in an aqueous alkali solution by an action of an acid;
- an acid generator;
- a plasticizer selected from the group consisting of ethylphthalylethylglycolate, tris(2-ethylhexyl) trimellitate and N-butylbenzene sulfonamide;
- and
- a solvent the amount of which is from 40 to 75% by mass of the total amount of the photoresist composition,
- said resin being a resin obtained by reacting a novolak resin, a compound having two or more vinyloxy groups and a resin comprising a structural unit represented by formula (a1-2), a structural unit represented by formula (a2-1), or both of the structural units:
- wherein Ra1′ and Ra2′ each independently represent a hydrogen atom or a C1-C12 hydrocarbon group where a methylene group has optionally been replaced by an oxygen atom or a sulfur atom, Ra3′ represent a C1-C20 hydrocarbon group where a methylene group has optionally been replaced by an oxygen atom or a sulfur atom, or one of Ra1′ and Ra2′ is bonded to Ra3′ to form a C2-C20 divalent hydrocarbon group where a methylene group has optionally been replaced by an oxygen atom or a sulfur atom, and the other represents a hydrogen atom or a C1-C12 hydrocarbon group where a methylene group has optionally been replaced by an oxygen atom or a sulfur atom,
- Ra5 represents a hydrogen atom or a methyl group,
- Ra6 represents a C1-C6 alkyl group or a C1-C6 alkoxy group, and m represents an integer of 0 to 4,
- Ra7 represents a hydrogen atom or a methyl group, and
- Ra10 represents a C1-C6 alkyl group or a C1-C6 alkoxy group, and m′ represents an integer of 0 to 4.
8 more elements
Dependencies are inferred from the claim text.