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US 9,192,959 B2Granted
Mask frame assembly for thin film deposition
AssigneeSamsung Display Co., Ltd.
InventorJeremy Hong
Life of this patent
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Abstract
A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.
Claims10
A mask frame assembly for a thin film deposition, the mask frame assembly comprising:
- a mask frame including an opening and frames surrounding the opening;
- and
- a mask coupled to the mask frame, the mask comprising:
- a plurality of deposition patterns which are separated from each other;
- and
- a rib disposed between immediately adjacent deposition patterns and connecting the deposition patterns to each other, the rib comprising a first half-etched portion that is recessed from a surface of the rib and does not penetrate through the mask, the first half-etched portion of the rib having a rectangular shape and being enclosed by four sidewalls and a bottom wall of the rib, a thickness of the first half-etched portion being less than a thickness of another portion of the mask.
3 more elements
Dependencies are inferred from the claim text.