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US 9,192,054 B2Granted
Apparatus for anisotropic focusing
AssigneeOptomec, Inc.
InventorsBruce H. King, Steven Barry Woolfson, David H. Ramahi
Life of this patent
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Abstract
A substantially planar assembly for depositing material. The assembly comprises plates which, when assembled, define at least one aerosol channel, a sheath gas plenum, and a nozzle. These components are preferably anisotropic, and preferably rectangular. The aerosol channel may be divided further to improve uniformity of aerosol flow.
Claims12
A material deposition assembly comprising:
- a sheath gas plenum;
- at least one aerosol channel comprising a rectangular opening, said channel disposed concentrically within and surrounded by said sheath gas plenum;
- a convergence zone wherein a sheath gas forms a combined stream comprising an outer annular sheath flow and an inner aerosol-laden carrier flow by directly surrounding and focusing an aerosol exiting said opening;
- a nozzle comprising a rectangular cross section for transporting the combined stream;
- a first cover plate and a second cover plate, either or both of said cover plates comprising an inlet for an aerosol comprising a material and one or more sheath gas inlets;
- and
- an insert sealed between said cover plates, said insert comprising said at least one aerosol channel, said at least one aerosol channel in fluid connection with said aerosol inlet and said nozzle;
- wherein said one or more sheath gas inlets are in fluid connection with said sheath gas plenum, said sheath gas plenum enclosing an exit of said at least one aerosol channel and an entrance of said nozzle;
- and
- wherein said insert comprises two mirror imaged plates which when assembled together form said at least one aerosol channel and said nozzle.
7 more elements
Dependencies are inferred from the claim text.