US 9,188,553 B2Granted

X-ray fluorescence analyzer

AssigneeHitachi High-Tech Science Corporation

InventorsMasahiro Sakuta, Kiyoshi Hasegawa, Yoshiki Matoba

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Abstract

An X-ray fluorescence analyzer includes a sample stage having an opening at an X-ray irradiation position, an X-ray source which irradiates a sample placed on the opening with a primary X-ray from below, a detector which detects an X-ray fluorescence generated from the sample, a transparent drop prevention plate supported to be advanced and retracted immediately below the opening, a drive mechanism which advances and retracts the drop prevention plate, an observation camera which observes the drop prevention plate positioned immediately below the opening, and an operation unit which processes an image of the drop prevention plate which is captured by the observation camera. The operation unit detects a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.

Claims3

Dependent claims

An X-ray fluorescence analyzer comprising:

a sample stage which has an opening at an X-ray irradiation position and is configured to receive a sample placed on the opening;
an X-ray source which is configured to irradiate the sample placed on the opening with a primary X-ray from below;
a detector which is disposed below the opening and is configured to detect an X-ray fluorescence generated from the sample irradiated with the primary X-ray;
a drop prevention plate which is transparent and supported to be advanced and retracted immediately below the opening;
a drive mechanism which is configured to advance and retract the drop prevention plate;
an observation camera which is disposed below the opening to observe the drop prevention plate when the drop prevention plate is positioned immediately below the opening;
and
an operation unit which is configured to process an image of the drop prevention plate which is captured by the observation camera,
wherein the operation unit is configured to detect a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/222,778Filed 24 Mar 2014
Priority: JP 2013-06131125 Mar 2013
Published: US 2014/0286474 A125 Sep 2014
Granted: 17 Nov 2015
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

G01N 23/223
By measuring secondary emission from the material: by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
G01N 2223/317
Accessories, mechanical or electrical features: windows
G01N 2223/652
Specific applications or type of materials: impurities, foreign matter, trace amounts
G01N
Investigating or analysing materials by determining their chemical or physical properties