Substrate supporting edge ring with coating for improved soak performance
AssigneeApplied Materials, Inc.
InventorsJoseph M. Ranish, Aaron Muir Hunter
Life of this patent
Estimating the term…
Abstract
Embodiments of the present invention provide a substrate supporting edge ring for supporting a substrate. In one embodiment, a substrate support ring is provided. The substrate support ring comprises an annular body. The annular body comprises an outer band extending radially inward from an outer annular sidewall; and a substrate supporting region extending inward from an inner portion of the outer band, wherein the annular body comprises a first material that is exposed and at least a portion of the substrate supporting region is covered with a coating comprising a second material that is different than the first material.
Claims21
A substrate support ring, comprising:
- an annular body comprising a ceramic material that includes:
- an outer band comprising a film extending radially inward from an outer sidewall of the annular body, the film comprising a first silicon layer, an oxide layer, and a second silicon layer disposed on the oxide layer;
- and
- a substrate supporting region extending inward from an inner portion of the outer band.
A substrate support ring, comprising:
- an annular body comprising a ceramic material, the annular body comprising:
- a first sidewall;
- an outer band extending radially outward from the first sidewall, the outer band comprising a film having a first silicon layer, an oxide layer, and a second silicon layer disposed on the oxide layer, the first or second silicon layer selected from the group consisting of amorphous silicon, monocrystalline silicon, and polycrystalline silicon;
- a second sidewall extending from the outer band;
- and
- a substrate supporting region extending radially inward from the first sidewall.
A substrate support ring, comprising:
- an annular body comprising a first material, the annular body comprising:
- a first sidewall;
- an outer band extending radially outward from the first sidewall, the outer band comprising a coating made of a second material that is different than the first material;
- a second sidewall extending from the outer band;
- and
- a substrate supporting region extending radially inward from the first sidewall and having a surface disposed in a plane that is parallel to a plane of the outer band.
A substrate support ring, comprising:
- an annular body comprising a first material, the annular body comprising:
- a first sidewall;
- an outer band extending radially outward from the first sidewall, the outer band comprising a coating made of a second material that is different than the first material;
- a second sidewall extending from the outer band;
- and
- a substrate supporting region extending radially inward from the first sidewall, wherein the second material is provided as discontinuous patches on the outer band.
Dependencies are inferred from the claim text.