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US 9,184,084 B2Granted
Wafer handling traction control system
AssigneeLam Research Corporation
InventorMatthew J. Rodnick
Life of this patent
Estimating the term…
Abstract
A wafer handling traction control system is provided that is able to detect slippage of a semiconductor wafer with respect to an end effector and is able to adjust the end effector's movement in order to minimize further slippage. Upon the detection of relative motion of the semiconductor wafer with respect to the end effector past a threshold amount, the end effector's movements are adjusted to minimize slippage of the semiconductor wafer. The wafer handling traction control system may include a sensor that detects relative motion between the semiconductor wafer and the end effector.
Claims25
An apparatus comprising:
- a first robot arm configured to support a first semiconductor wafer on a first end effector;
- a first sensor configured to detect relative movement between the first semiconductor wafer and the first end effector;
- and
- a controller with one or more processors and a memory, wherein the one or more processors, the memory, the first robotic arm, and the first sensor are communicatively connected and the memory stores program instructions for controlling the one or more processors to:
- a) cause the first robot arm to move according to a first acceleration profile while the first semiconductor wafer is supported by the first end effector,
- b) receive first sensor data from the first sensor,
- c) analyze the first sensor data to determine first motion data based on relative movement of the first semiconductor wafer with respect to the first end effector during motion of the first robot arm while the first semiconductor wafer is supported by the first end effector,
- d) determine whether the first motion data attributable to movement of the first robot arm according to the first acceleration profile exceeds a first threshold motion metric, and
- e) cause the first robot arm to move according to a second acceleration profile when the first motion data attributable to movement of the first robot arm according to the first acceleration profile exceeds the first threshold motion metric, wherein the first motion data attributable to movement of the first robot arm according to the second acceleration profile stays within the first threshold motion metric.
6 more elements
A method comprising:
- a) moving a first robot arm, including a first end effector supporting a first semiconductor wafer, according to a first calibration acceleration profile;
- b) receiving first sensor data from a first sensor configured to detect relative movement between the first semiconductor wafer and the first end effector;
- c) analyzing the first sensor data to determine first motion data based on relative movement of the first semiconductor wafer with respect to the first end effector during motion of the first robot arm while the first semiconductor wafer is supported by the first end effector;
- and
- d) determining whether the first motion data attributable to movement of the first robot arm according to the first calibration acceleration profile exceeds a first threshold motion metric.
2 more elements
A method comprising:
- moving a first robot arm, including a first end effector supporting a first semiconductor wafer, according to a first operational acceleration profile;
- receiving a first sensor data from a first sensor configured to detect relative movement between the first semiconductor wafer and the first end effector;
- analyzing the first sensor data to determine first motion data based on relative movement of the first semiconductor wafer with respect to the first end effector during motion of the first robot arm while the first semiconductor wafer is supported by the first end effector;
- determining that the first motion data attributable to movement of the first robot arm according to the first operational acceleration profile exceeds a first threshold motion metric;
- and
- moving the first robot arm according to a second operational acceleration profile when the first motion data attributable to movement of the first robot arm according to the first operational acceleration profile exceeds the first threshold motion metric, wherein the first motion data attributable to movement of the first robot arm according to the second operational acceleration profile stays within the first threshold motion metric.
3 more elements
Dependencies are inferred from the claim text.