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US 9,184,016 B2Granted
Field emission cathode device and field emission equipment using the same
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsPeng Liu, Chun-Hai Zhang, Duan-Liang Zhou, Bing-Chu Du, Cai-Lin Guo, Pi-Jin Chen, Shou-Shan Fan
Life of this patent
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Abstract
A field emission cathode device includes a cathode electrode. An electron emitter is electrically connected to the cathode electrode, wherein the electron emitter includes a number of sub-electron emitters. An electron extracting electrode is spaced from the cathode electrode by a dielectric layer, wherein the electron extracting electrode defines a through-hole. The distances between an end of each of the sub-electron emitters away from the cathode electrode and a sidewall of the through-hole are substantially equal.
Claims18
A field emission cathode device, comprising:
- a cathode electrode having a planar surface;
- an electron emitter located on the planar surface of the cathode electrode and electrically connected to the cathode electrode, wherein the electron emitter comprises a plurality of sub-electron emitters, a height of the electron emitter gradually reduces from a center of the electron emitter out to each of edge of the electron emitter;
- and a connecting line of the end of each of the plurality of sub-electron emitters, away from the cathode electrode, is consistent with the shape of the sidewall of the through-hole;
- an electron extracting electrode spaced from the cathode electrode by a dielectric layer, wherein the electron extracting electrode defines a through-hole, and a part of the plurality of sub-electron emitters extends to the through-hole;
- wherein the distances between an end of each of the plurality of sub-electron emitters away from the cathode electrode and the closest portion of a sidewall of the through-hole are substantially equal.
2 more elements
A field emission equipment, comprising:
- a cathode electrode having a planar surface;
- an electron emitter located on the planar surface of the cathode electrode and electrically connected to the cathode electrode, wherein the electron emitter comprises a plurality of sub-electron emitters, a height of the electron emitter gradually reduces from a center of the electron emitter out to each of edge of the electron emitter;
- and a connecting line of the end of each of the plurality of sub-electron emitters, away from the cathode electrode, is consistent with the shape of the sidewall of the through-hole;
- an electron extracting electrode spaced from the cathode electrode by a dielectric layer, wherein the electron extracting electrode defines a through-hole, and a part of the plurality of sub-electron emitters extends to the through-hole, a connecting line of an end of each of the plurality of sub-electron emitters away from the cathode electrode is consistent with the shape of a sidewall of the through-hole;
- and
- an anode electrode having a fluorescent layer located on a surface of the anode electrode, wherein the electron extracting electrode is located between the cathode electrode and the anode electrode.
3 more elements
A field emission equipment, comprising:
- a cathode electrode having a planar surface;
- an electron emitter located on the planar surface of the cathode electrode and electrically connected to the cathode electrode, wherein the electron emitter comprises a plurality of sub-electron emitters, a height of the electron emitter gradually reduces from a center of the electron emitter out to each of edge of the electron emitter;
- and a connecting line of the end of each of the plurality of sub-electron emitters, away from the cathode electrode, is consistent with the shape of the sidewall of the through-hole;
- an electron extracting electrode spaced from the cathode electrode by a dielectric layer, wherein the electron extracting electrode defines a through-hole, and a part of the plurality of sub-electron emitters extends to the through-hole, distances between an end of each of the plurality of sub-electron emitters away from the cathode electrode and the closest portion of a sidewall of the through-hole are substantially equal;
- a first substrate and a second substrate formed a resonator;
- and
- a lens located on one end of the resonator to form an output terminal, wherein electrons extracted from the electron emitter are oscillated in the resonator and exported through the output terminal.
4 more elements
Dependencies are inferred from the claim text.