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US 9,181,080 B2Granted
MEMS microphone with low pressure region between diaphragm and counter electrode
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Andreas Froemel
Life of this patent
Estimating the term…
Abstract
A MEMS microphone includes a first diaphragm element, a counter electrode element, and a low pressure region between the first diaphragm element and the counter electrode element. The low pressure region has a pressure less than an ambient pressure.
Claims24
A MEMS microphone comprising:
- a first diaphragm element;
- a second diaphragm element spaced apart from the first diaphragm element;
- a low pressure region between the first diaphragm element and the second diaphragm element, the low pressure region having a pressure less than an ambient pressure;
- a first counter electrode element disposed within the low pressure region;
- and
- a second counter electrode element spaced apart from the first counter electrode element and disposed within the low pressure region.
3 more elements
A MEMS microphone, comprising:
- a first diaphragm element;
- a second diaphragm element spaced apart from the first diaphragm element;
- a low pressure region disposed between the first diaphragm element and the second diaphragm element, the low pressure region having a pressure less than an ambient pressure;
- a first counter electrode element disposed within the low pressure region;
- and
- one or more pillars coupled between the first diaphragm element and the second diaphragm element, wherein the one or more pillars are electrically conductive.
3 more elements
A MEMS microphone, comprising:
- a first diaphragm element;
- a second diaphragm element spaced apart from the first diaphragm element;
- a low pressure region disposed between the first diaphragm element and the second diaphragm element, the low pressure region having a pressure less than an ambient pressure;
- a first counter electrode element disposed within the low pressure region;
- and
- a third diaphragm element, the third diaphragm element having a stiffness which is less than the stiffness of the first diaphragm element or the stiffness of the second diaphragm element.
3 more elements
Dependencies are inferred from the claim text.