Resonating element, resonator, oscillator, electronic apparatus, and mobile object
AssigneeSeiko Epson Corporation
InventorsMatsutaro Naito, Toshiaki Sato, Jun Nishide, Takumi Suzuki
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Abstract
A resonating element has a quartz crystal substrate having a vibrating portion and a thin-walled portion that is thinner than the vibrating portion, and a pair of excitation electrodes respectively disposed on opposite surfaces of the vibrating portion. Moreover, in the excitation electrode, each of a pair of sides arranged in a Z′-axis direction is convexly curved toward the center so that the excitation electrode has a constricted portion in which a length in the Z′-axis direction increases gradually from a central portion toward both ends in an X-axis direction.
Claims15
A resonating element comprising:
- a quartz crystal substrate having a vibrating portion and a thin-walled portion integrated with the vibrating portion, the vibrating portion including a vibration region vibrating in a thickness-shear vibration direction, the thin-walled portion being thinner than the vibrating portion;
- and
- a pair of excitation electrodes respectively disposed on opposite surfaces of the vibrating portion, wherein
- when directions orthogonal to each other in a plan view of the quartz crystal substrate are a first direction and a second direction, at least one of the pair of excitation electrodes has a constricted portion where each of a pair of sides of the excitation electrode extending in the first direction includes a portion that is convexly curved toward a center line of the excitation electrode in the second direction.
Dependencies are inferred from the claim text.