Linear motor and stage device

A stage device comprising:

• a linear motor having an X axis direction and a Y axis direction orthogonal to the X axis direction, the linear motor being a driving source of a linear motion mechanism, the linear motor comprising:
• a field magnet serving as one of a rotor and a stator, the field magnet comprising:
• a pair of planar, mutually opposing field magnet yokes;
• a yoke base on a first end of each of the pair of field magnet yokes in the Y axis direction;
• and
• only two magnet rows with a first magnet row and a second magnet row,
• the first magnet row being between the pair of field magnet yokes, the first magnet row comprising a plurality of mutually opposing pairs of first magnets along the X axis direction, the first magnets of each of the pairs having mutually different polarities, and
• the second magnet row being between the pair of field magnet yokes, the second magnet row being to at least one of a first side and a second side of the first magnet row in the Y axis direction, the second magnet row comprising a pair of mutually opposing second magnets having mutually different polarities, the pair of mutually opposing second magnets forming only a single row in the Y axis direction on each of the pair of field magnet yokes, the pair of mutually opposing second magnets each having a unitary structure and each having north and south poles aligned to extend in a Z direction that is orthogonal to both the X axis direction and the Y axis direction;
• and
• an armature serving as another one of the rotor and the stator, the armature comprising:
• a first armature coil opposite the first magnet row;
• and
• a second armature coil opposite the second magnet row,
• wherein the rotor is movable in the X axis direction and the Y axis direction, and
• wherein the second magnet row with the yoke base forms a closed loop of magnetic field for driving the rotor in the Y axis direction.