US 9,178,256 B2 · Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators

Abstract

This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.

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Drawings

Claims25

Dependent claims

A device comprising:

an evanescent-mode electromagnetic-wave cavity resonator including:
a first dielectric cavity portion including a cavity operable to support at least one evanescent electromagnetic wave mode, the first cavity portion including an inner cavity surface defining the cavity;
a first conductive layer on the inner cavity surface;
a second cavity portion adjacent the first cavity portion, the second cavity portion including a cavity ceiling surface defining a ceiling of the cavity;
a dielectric post structure extending distally away from a central region of the inner cavity surface towards the cavity ceiling surface, a distal surface of the post structure being separated from the cavity ceiling surface by a gap distance, a resonant frequency of the at least one evanescent electromagnetic wave mode being dependent at least partially on the gap distance;
a second conductive layer on the post structure;
at least one dielectric spacer in a first region between the distal surface of the post structure and the cavity ceiling surface, the at least one dielectric spacer defining a static portion of the gap distance;
and
at least one tuning element between the distal surface of the post structure and the cavity ceiling surface, the at least one tuning element including:
a first portion or first tuning element that physically couples the cavity ceiling surface with the at least one dielectric spacer in the first region, and
a second portion or second tuning element that includes at least one microelectromechanical systems (MEMS) structure actuatable to adjust a capacitance across the gap distance in a second region outside of the first region to effect a change in the resonant frequency of the at least one evanescent electromagnetic wave mode.

8 more elements

A device comprising:

an evanescent-mode electromagnetic-wave cavity resonating means including:
a first dielectric cavity means operable to support at least one evanescent electromagnetic wave mode, the first cavity means including an inner cavity surface defining the cavity;
a first conductive means on the inner cavity surface;
a second cavity means adjacent the first cavity means, the second cavity means including a cavity ceiling surface defining a ceiling of the cavity;
a dielectric capacitive tuning means extending distally away from a central region of the inner cavity surface towards the cavity ceiling surface, a distal surface of the capacitive tuning means being separated from the cavity ceiling surface by a gap distance, a resonant frequency of the at least one evanescent electromagnetic wave mode being dependent at least partially on the gap distance;
a second conductive means on the capacitive tuning means;
at least one dielectric spacer means in a first region between the distal surface of the capacitive tuning means and the cavity ceiling surface, the at least one dielectric spacer means defining a static portion of the gap distance;
and
at least one actuatable tuning means between the distal surface of the capacitive tuning means and the cavity ceiling surface, the at least one actuatable tuning means including:
a first portion or first tuning element that physically couples the cavity ceiling surface with the at least one dielectric spacer means in the first region, and
a second portion or second tuning element that includes at least one microelectromechanical systems (MEMS) structure actuatable to adjust a capacitance across the gap distance in a second region outside of the first region to effect a change in the resonant frequency of the at least one evanescent electromagnetic wave mode.

8 more elements

Dependencies are inferred from the claim text.

Description18,405 words

Summary1,636 words

#This disclosure relates generally to electromechanical systems (EMS), and more specifically to isotropically-etched cavities for use in evanescent-mode electromagnetic-wave cavity resonators.

#Electromechanical systems (EMS) include devices having electrical and mechanical elements, transducers such as actuators and sensors, optical components (including mirrors), and electronics. EMS can be manufactured at a variety of scales including, but not limited to, microscales and nanoscales. For example, microelectromechanical systems (MEMS) devices can include structures having sizes ranging from about one micron to hundreds of microns or more. Nanoelectromechanical systems (NEMS) devices can include structures having sizes smaller than one micron including, for example, sizes smaller than several hundred nanometers. Electromechanical elements may be created using deposition, etching, lithography, or other micromachining processes that etch away parts of substrates or deposited material layers, or that add layers to form electrical, mechanical, and electromechanical devices.

#One type of EMS device is called an interferometric modulator (IMOD). As used herein, the term IMOD or interferometric light modulator refers to a device that selectively absorbs or reflects light using the principles of optical interference. In some implementations, an IMOD may include a pair of conductive plates, one or both of which may be transparent or reflective, wholly or in part, and capable of relative motion upon application of an appropriate electrical signal. In an implementation, one plate may include a stationary layer deposited on a substrate and the other plate may include a reflective membrane separated from the stationary layer by an air gap. The position of one plate in relation to another can change the optical interference of light incident on the IMOD. IMOD devices have a wide range of applications, and are anticipated to be used in improving existing products and creating new products, especially those with display capabilities.

Brief description of the drawings46 figures

#FIG. 1A shows a cross-sectional side view depiction of an example evanescent-mode electromagnetic-wave cavity resonator.

#FIG. 1B shows a cross-sectional side view depiction of the example evanescent-mode electromagnetic-wave cavity resonator of FIG. 1A in an actuated state.

#FIGS. 2A-2D show cross-sectional side views of simulations of example cavity shapes formed using one or more isotropic etching operations.

Detailed description15,855 words

#Like reference numbers and designations in the various drawings indicate like elements.

#The following detailed description is directed to certain implementations for the purposes of describing the innovative aspects. However, the teachings herein can be applied and implemented in a multitude of different ways.

#The disclosed implementations include examples of structures and configurations of EMS and MEMS resonator devices, including evanescent-mode electromagnetic-wave cavity resonators (hereinafter “evanescent-mode cavity resonators” or simply “cavity resonators)). Related apparatus, systems, and fabrication processes and techniques are also disclosed.

Facts

Application

13/451,385Filed 19 Apr 2012

Published

US 2013/0278609 A124 Oct 2013

Granted

3 Nov 2015

Term ends

19 Mar 2033

Estimated · how

20 years from earliest known nonprovisional domestic filing plus recorded patent term adjustment, including 334 days of adjustment. Maintenance-fee lapses, terminal disclaimers and statutory extensions have not been checked. The continuity chain may be incomplete; this is not an enforceability determination.

Classification8 codes

H01P 1/208
Hollow waveguide filters: cascaded cavities; Cascaded resonators inside a hollow waveguide structure
H01P 1/2084
Cascaded cavities; Cascaded resonators inside a hollow waveguide structure: with dielectric resonators
H01P 7/06
Resonators of the waveguide type: cavity resonators
H01P 11/007
Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type: manufacturing…

Timeline

19 Apr 2012Application filedUS 13/451,385
25 Apr 2012Assigned to Qualcomm Mems Technologies, Inc.assignment of assignor's interest
24 Oct 2013PublishedUS 2013/0278609 A1
3 Nov 2015GrantedUS 9,178,256 B2
31 Aug 2016Assigned to Snaptrack, Inc.assignment of assignor's interest
12 Oct 2026TodayWithin its term
19 Mar 2033Term endsEstimated, includes 334 days of adjustment

Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators

Life of this patent

Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators

Life of this patent

Life of this patent

Abstract

Drawings

Drawings

Claims25

Description18,405 words

Classification8 codes

Life of this patent

Drawings

Description18,405 words