Apparatus and methods for fabricating solar cells
AssigneeTSMC Solar Ltd.
InventorsWen-Tsai Yen, Jyh-Lih Wu, Wei-Lun Xu, Chung-Hsien Wu
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Abstract
A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.
Claims20
A method for fabricating a solar cell, said method comprising:
- delivering a solar cell substructure to a chamber;
- generating electromagnetic radiation using a wave generating device coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure;
- and
- applying the electromagnetic radiation onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.
An apparatus comprising:
- a chamber configured to receive a solar cell substructure from at least one other chamber;
- and
- a wave generating device coupled to said chamber such that said wave generating device is positioned proximate to the solar cell substructure when said chamber receives the solar cell substructure, wherein said wave generating device is configured to generate electromagnetic radiation and to apply the electromagnetic radiation onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure.
A method for fabricating a solar cell, said method comprising:
- delivering a solar cell substructure to a chamber, wherein the solar cell substructure includes an precursor layer, a buffer layer on at least a portion of the precursor layer, and a front contact layer on at least a portion of the buffer layer;
- generating electromagnetic radiation using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure;
- and
- applying, selectively, the electromagnetic radiation onto at least a portion of the solar cell substructure such that the electromagnetic radiation travels through at least a portion of the precursor layer, the buffer layer, and the front contact layer to enable the diffusion of at least one metal element through at least a portion of the solar cell substructure.
Dependencies are inferred from the claim text.