Precursor composition and method for forming amorphous conductive oxide film
AssigneeJapan Science and Technology Agency
InventorsTatsuya Shimoda, Jinwang Li
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Abstract
The present invention provides a precursor composition for forming a conductive oxide film having high conductivity and a stable amorphous structure maintained even after heated at high temperature by a simple liquid phase process. The precursor composition of the present invention contains at least one selected from the group consisting of carboxylates, nitrates and sulfates of lanthanoids (but, except for cerium); at least one selected from the group consisting of carboxylates, nitrosyl carboxylates, nitrosyl nitrates and nitrosyl sulfates of ruthenium, iridium or rhodium; and a solvent containing at least one selected from the group consisting of carboxylic acids, alcohols and ketones.
Claims11
A composition comprising:
- at least one selected from the group consisting of carboxylates, nitrates and sulfates of lanthanoids except for cerium,
- at least one selected from the group consisting of carboxylates, nitrosyl carboxylates, nitrosyl nitrates and nitrosyl sulfates of ruthenium, iridium or rhodium, and
- a solvent comprising at least one selected from the group consisting of carboxylic acids, alcohols and ketones,
- wherein a ratio (NA/NB) of a number of atoms of the lanthanoid (NA) and a number of atoms of ruthenium, iridium or rhodium (NB) in the composition is 0.6 to 2.0.
Dependencies are inferred from the claim text.