Array of nanowires in a single cavity with anti-reflective coating on substrate
AssigneeZena Technologies, Inc.
InventorMunib Wober
Life of this patent
Estimating the term…
Abstract
An embodiment relates to image sensor comprising one or more nanowires on a substrate of a cavity, the nanowire being configured to transmit a first portion of an electromagnetic radiation beam incident on the sensor, and the substrate that absorbs a second portion of the electromagnetic radiation beam incident on the sensor, wherein the first portion is substantially different from the second portion. The substrate could have a anti-reflective material. The ratio of a diameter of the cavity to a diameter of the nanowire could be at less than about 10.
Claims40
An image sensor comprising one or more upstanding nanowires on a substrate, the nanowires being configured to transmit a first portion of an electromagnetic radiation beam incident on the sensor but not to transmit a second portion of the electromagnetic radiation beam incident on the sensor, and the substrate comprising an anti-reflective material that absorbs the second portion of the electromagnetic radiation beam incident on the sensor, wherein the first portion has frequencies higher than a cutoff frequency and the second portion has frequencies lower than the cutoff frequency, wherein the anti-reflective material absorbs at least 68 percent of optical light incident on the anti-reflective material, and wherein the anti-reflective material does not disrupt electronic surface properties of the substrate to cause surface current leakage or provide sites for recombination of carriers generated by photons;
- wherein the first portion comprises infrared radiation.
Dependencies are inferred from the claim text.