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US 9,177,963 B2Granted
Forming a low votage antifuse device and resulting device
AssigneeGlobalfoundries Inc.
InventorsAnurag Mittal, Marc Tarabbia
Life of this patent
Estimating the term…
Abstract
Methods for a low voltage antifuse device and the resulting devices are disclosed. Embodiments may include forming a plurality of fins above a substrate, removing a portion of a fin, forming a fin tip, forming a first area of a gate oxide layer above at least the fin tip, forming a second area of the gate oxide layer above a remaining portion of the plurality of fins, wherein the first area is thinner than the second area, and forming a gate over at least the fin tip to form an antifuse one-time programmable device.
Claims20
A method comprising:
- forming a plurality of fins above a substrate;
- removing a portion of a fin, forming a fin tip;
- forming a first area of a gate oxide layer above at least the fin tip;
- forming a second area of the gate oxide layer above a remaining portion of the plurality of fins, wherein the first area is thinner than the second area;
- and
- forming a gate over at least the fin tip to form an antifuse one-time programmable device.
3 more elements
An apparatus comprising:
- a substrate;
- a plurality of fins above the substrate, at least one fin including a fin tip;
- a gate oxide layer, the gate oxide layer including a first area above at least the fin tip and a second area above a remaining portion of the plurality of fins, wherein the first area is thinner than the second area;
- and
- a gate over the fin tip.
2 more elements
A method comprising:
- forming a plurality of fins above a substrate;
- removing a portion of a fin, forming a fin tip;
- forming a first oxide layer over a first area and a second area, the first area covering at least the fin tip and the second area covering remaining fins of the plurality of fins;
- forming a mask over the second area;
- removing the first oxide layer in the first area;
- forming a second oxide layer over the first area and the second area;
- and
- forming a plurality of gates over the substrate and the plurality of fins, at least one gate formed over the fin tip forming an antifuse one-time programmable device.
5 more elements
Dependencies are inferred from the claim text.