Reaction absorber and semiconductor assembling system
AssigneeFasford Technology Co., Ltd.
InventorsMasayuki Mochizuki, Yasushi Ishii
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AssigneeFasford Technology Co., Ltd.
InventorsMasayuki Mochizuki, Yasushi Ishii
Estimating the term…
The present invention aims to provide a lightened reaction absorber or to provide a semiconductor assembling system with further shorter processing time and high productivity or high quality using the lightened reaction absorber. The present invention is based upon a reaction absorber provided with a counter mechanism equipped with a load unit moved in a predetermined direction by a first ball screw, a second ball screw that generates reactive force in a reverse direction to the predetermined direction and a driving unit having a driving motor that drives the first ball screw and the second ball screw, and has a characteristic of including a reaction absorbing unit with one end side equipped with a nut connected to the second ball screw and the other end side fixed to a unit base movable relatively to the counter mechanism.
A semiconductor assembling system, comprising:
A semiconductor assembling system, comprising:
Dependencies are inferred from the claim text.