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US 9,177,877 B2Granted
Temperature-adjusted spectrometer
AssigneeFirst Solar, Inc.
InventorsMarkus E. Beck, Ming L. Yu
Life of this patent
Estimating the term…
Abstract
A temperature-adjusted spectrometer can include a light source and a temperature sensor.
Claims18
A method of obtaining a temperature-adjusted spectrum from a sample area of a substrate, comprising:
- generating light to illuminate a sample area of a substrate by a light source,
- wherein the light is reflected from the sample area, the reflected light comprising a scattered radiation;
- analyzing the scattered radiation by a spectral analyzer to obtain a spectrum of the sample area of the substrate;
- directing thermal radiation from material deposited on the substrate to a temperature sensor through a first lens;
- measuring the temperature of the material deposited on the substrate from the thermal radiation by the temperature sensor;
- and
- blocking the light during the temperature measurement to avoid the influence of the light on the temperature measurement.
4 more elements
A method of obtaining a temperature-adjusted spectrum from a sample area of a substrate, comprising,
- generating light to illuminate a sample area of a substrate by a light source,
- wherein the light is reflected from the sample area, the reflected light comprising a scattered radiation;
- analyzing the scattered radiation by a spectral analyzer to obtain a spectrum of the sample area of the substrate;
- directing thermal radiation from material deposited on the substrate to a temperature sensor through a first lens;
- measuring the temperature of the material deposited on the substrate from the thermal radiation by the temperature sensor;
- and
- blocking the temperature sensor during analyzing the scattered radiation to avoid the interference with the scattered radiation measurement.
4 more elements
A method of manufacturing a photovoltaic device, comprising:
- forming a film on a substrate;
- generating light to illuminate a sample area of the film on the substrate by a light source, wherein the light is reflected from the sample area, the reflected light comprising a scattered radiation;
- analyzing the scattered radiation by a spectral analyzer to obtain a spectrum of the sample area of the substrate;
- analyzing thermal radiation from the sample area of the substrate by a temperature sensor to obtain the temperature of the sample area of the substrate;
- analyzing the spectrum with the measured temperature by a calibration module to provide a temperature-adjusted spectrum;
- and
- monitoring the film's composition based a temperature-adjusted spectrum from the sample area of the substrate.
4 more elements
Dependencies are inferred from the claim text.