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US 9,177,841 B2Granted
Coating slit apparatus for coating a substrate and method for coating using the same
AssigneeSamsung Display Co., Ltd.
InventorsGil-Hwan Yeo, Dong-Hwan Kim, Sung-Ku Baek, Chan-Uk Jon, Il-Sup Choi
Life of this patent
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Abstract
An exemplary embodiment of the present invention discloses a coating apparatus including a stage configured to receive a substrate and a coating slit part. The coating slit part includes a guide member, a first body, a second body, and a discharge nozzle. The coating slit part is configured to dispose a coating material on the substrate.
Claims8
A coating apparatus, comprising:
- a stage configured to receive a substrate;
- a coating slit part configured to apply coating materials to the substrate, the coating slit part comprising:
- a first body;
- an opposing second body;
- a third body arranged between the first body and the second body, the first, second, and third bodies forming a discharge nozzle through which the coating materials are discharged;
- and
- a guide member that extends from an end portion of the third body and away from the discharge nozzle;
- and
- a providing part configured to provide the coating materials to the coating slit part,
- wherein:
- the discharge nozzle comprises:
- a first discharge nozzle formed by the first body and the guide member extended from the end portion of the third body;
- and
- a second discharge nozzle formed by the second body and the guide member extended from the end portion of the third body so that the coating materials are separately discharged;
- the guide member is configured to extend toward the substrate so as to be closer to the substrate than the first and second bodies;
- and
- a width of a cross-section of the guide member is greater than a width of a cross-section of the third body.
14 more elements
Dependencies are inferred from the claim text.