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US 9,177,840 B2Granted
System and method for controlling a thermal array
AssigneeWatlow Electric Manufacturing Company
InventorsCal T. Swanson, Philip S. Schmidt
Life of this patent
Estimating the term…
Abstract
A thermal array system is provided. The thermal array system having each thermal element connected between a first power node and a second power node of the plurality of power nodes and each thermal element being connected in electrical series with an addressable switch configured to activate and deactivate the thermal element.
Claims25
A thermal system comprising:
- a plurality of thermal elements;
- a control system having a plurality of power nodes, wherein each thermal element is connected between a first power node and a second power node of the plurality of power nodes, each thermal element being connected in electrical series with an addressable switch configured to activate and deactivate the thermal element, wherein each thermal element is independently controlled by the control system.
A heater comprising:
- a base plate;
- a base heater secured to the base plate;
- a substrate secured to the base heater;
- a tuning heater secured to the substrate, the tuning heater comprising a plurality of heater elements;
- a chuck secured to the tuning heater;
- and
- a control system having a plurality of power nodes, wherein each heater element is connected between a first power node and a second power node of the plurality of power nodes, each heater element being connected in electrical series with an addressable switch configured to activate and deactivate the heater element, wherein each heating element is independently controlled by the control system.
4 more elements
Dependencies are inferred from the claim text.