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US 9,177,814 B2Granted
Suspended superconducting qubits
AssigneeInternational Business Machines Corporation
InventorsJosephine B. Chang, George A. Keefe, Chad T. Rigetti, Mary E. Rothwell
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Abstract
A qubit system includes a substrate layer, a qubit circuit suspended above the substrate layer and fine structure disposed between the qubit circuit and the substrate layer.
Claims5
A qubit system, comprising:
- a substrate layer;
- a qubit circuit suspended above the substrate layer, the qubit circuit comprising a trilayer Josephson junction having a suspended portion disposed between anchored larger portions at opposing ends of the suspended portion;
- and
- a fine structure disposed between the qubit circuit and the substrate layer;
- wherein the fine structure is a portion of the substrate that has been undercut to form an undercut structure such that the suspended portion is completely undercut from the substrate, and the anchored larger portions are only partially undercut from the substrate such that a mid-portion of a bottom surface of the anchored larger portions are in contact with the substrate, and outer portions of the bottom surface of anchored larger portions are not in contact with the substrate.
2 more elements
Dependencies are inferred from the claim text.