Manufacturing method of semiconductor device

A manufacturing method of a semiconductor device comprising the steps of:

• (a) providing a wafer stage;
• (b) supporting a semiconductor wafer, having a first surface, on the wafer stage;
• (c) providing an insulating film formed over the first surface of the semiconductor wafer and having an insulating film upper surface;
• (d) forming a recess extending downwards from the insulating film upper surface and with the so-formed recess having a recess inner surface;
• (e1) forming a first-layer film of a tungsten-containing barrier metal film and having a first-layer film inner surface directly contacting the recess inner surface of the recess and also directly contacting the upper surface of the first insulating film and having a first-layer film outer surface;
• (e2) forming the first-layer film of the tungsten-containing barrier metal film using ionization sputtering film formation while applying a bias voltage to the semiconductor wafer resulting in the first-layer film of the tungsten-containing barrier metal film having an amorphous structure with barrier properties;
• (e3) forming a second-layer film of the tungsten-containing barrier metal film having a second-layer film inner surface directly contacting the outer surface of the first-layer film of the tungsten-containing barrier metal film and having a second-layer film outer surface;
• (e4) forming the second-layer film of the tungsten-containing barrier metal film using ionization sputtering film formation, without substantially applying a bias voltage to the semiconductor wafer resulting in the second-layer film of the tungsten containing barrier metal film having a columnar crystal structure with a reflow property to aluminum;
• (f) after the steps (e1), (e2), (e3) and (e4), forming a seed aluminum-containing metal film having an inner surface covering the outer surface of the second-layer tungsten-containing barrier metal film which was formed over the first layer film of the tungsten-containing barrier metal film directly contacting the inner surface of the recess and the upper surface of the first insulating film, with the seed aluminum-containing metal film having an upper surface;
• (g) forming the seed aluminum-containing metal film using ionization sputtering film formation, while applying a bias voltage to the semiconductor wafer, and while setting a temperature of the wafer stage between 400° C. and 440° C., resulting in the seed aluminum-containing metal film not closing an upper portion of the recess;
• and
• (h) forming an aluminum-containing metal film covering the upper surface of the seed aluminum-containing metal film using ionization sputtering film formation, without substantially applying a bias voltage to the semiconductor wafer resulting in the aluminum-containing metal film filling the recess and covering the second-layer film of the tungsten-containing barrier metal film outside the recess.