Mass spectrometer
AssigneeHitachi High-Technologies Corporation
InventorsHideki Hasegawa, Hiroyuki Satake, Masao Suga, Yuichiro Hashimoto
Life of this patent
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Abstract
An object of the present invention is to prevent lowering of introduction efficiency of ions and to reduce labor for a cleaning operation. In order to solve the above problems, the present invention provides a mass spectrometer where ion introduction hole of an electrode is divided into a first region, a second region, and a third region, a central axis direction of the ion introduction hole in both or either one of the first region and the third region is different from a flow direction axis of the ion inside the ion introduction hole in the second region, and axes of the ion introduction hole in the first region and the third region are in an eccentric position relationship.
Claims8
A mass spectrometer, which introduces ions generated under atmospheric pressure into a vacuum chamber exhausted by vacuum exhausting means and analyzes a mass of the ion, comprising:
- an electrode, in which ion introduction hole introducing the ion into the vacuum chamber is opened, wherein
- the ion introduction hole of the electrode is divided into a first region, a second region, and a third region,
- a central axis direction of the ion introduction hole in both or either one of the first region and the third region is different from a flow direction axis of the ion inside the ion introduction hole in the second region,
- the second region has no outlet other than outlets leading to the first region and the third region,
- the electrode can be separated between the first region and the second region or between the third region and the second region or in a midway of the second region, and
- axes of the ion introduction hole in the first region and the third region are in an eccentric position relationship.
Dependencies are inferred from the claim text.