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US 9,177,770 B2Granted
Ion gate method and apparatus
AssigneeExcellims Corporation
InventorsMark A. Osgood, Ching Wu
Life of this patent
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Abstract
The present invention generally relates to systems and methods for transmitting beams of charged particles, and in particular to such systems and methods that employ defecting at least one set of grid elements into the same plane to form an ion gate. In addition, an operation method of closing a gate involving alternating voltages on the adjacent gate wires is described.
Claims6
A method for manufacturing an ion gate for a charged particle stream, comprising electrically isolated grid elements that lie in the same plane, the method comprising the steps of:
- a. fabricating at least two gate elements, wherein each gate element includes at least one set of grid elements;
- and wherein fabricating the gate element includes removing portions of a substantially planar metal foil to form a plurality of grid elements;
- b. assembling an insulating layer between the gate elements;
- c. bending at least one set of grid elements into substantially the same plane of the other set of grid elements with at least one substrate;
- and
- d. securing the gate elements and the substrates together.
3 more elements
Dependencies are inferred from the claim text.