Processing apparatus and method using a scanning electron microscope

A processing apparatus using a scanning electron microscope, comprising:

• the scanning electron microscope having an electron optical system for imaging a sample, the electron optical system radiating and scanning a focused electron beam on the sample placed on a stage;
• and
• an image processing/control section which controls the scanning electron microscope and processes an image obtained by imaging with the scanning electron microscope,
• wherein the electron optical system of the scanning electron microscope has image shift electrodes comprised of electrostatic electrodes, the image shift electrodes moving a position at which to apply the focused electron beam onto the sample with the stage stopped to thereby shift a region in which the sample is to be imaged,
• wherein each of the image shift electrodes comprised of the electrostatic electrodes has a function of a deflection electrode for scanning the electron beam, and
• wherein the image processing/control section has an image shift deflection control unit which outputs a signal to the image shift electrodes, the output signal being obtained by superposing an image shift control signal and a deflection signal for deflecting the electron beam on each other.