Organic/inorganic composite comprising three-dimensional carbon nanotube networks, method for preparing the organic/inorganic composite and electronic device using the organic/inorganic composite

A method for preparing an organic/inorganic composite, the method comprising:

• (a) preparing an n-type silicon wafer having a plurality of nanorods or a plurality of nanoholes formed in a surface of the n-type silicon wafer, wherein the nanorods have a height of 2 to 200 μm, an aspect ratio of 2 to 100 and are spaced apart from each other at intervals of 50 to 2,000 nm, and wherein the nanoholes have a height of 2 to 200 μm, an aspect ratio of 2 to 100 and are spaced apart from each other at intervals of 50 to 2,000 nm;
• (b) preparing a Fe—Mo catalyst solution;
• (c) modifying outer wall surfaces of the nanorods or inner wall surfaces of the nanoholes into Si—OH to form a surface-modified n-type silicon wafer, using piranha solution, UV-ozone or oxygen plasma;
• (d) adsorbing the Fe—Mo catalyst solution on the entire outer wall surfaces of the nanorods or the entire inner wall surfaces of the nanoholes of the surface-modified n-type silicon wafer to form a catalyst-absorbed n-type silicon wafer, by dipping the surface-modified n-type wafer in the Fe—Mo catalyst solution;
• (e) reducing the Fe—Mo catalyst solution of the catalyst-absorbed n-type silicon wafer into metal catalyst to form a metal catalyst-adsorbed n-type silicon wafer, by annealing the catalyst-absorbed n-type silicon wafer while supplying ammonia (NH3) or hydrogen (H2) gas;
• and
• (f) supplying a carbon source gas to the metal catalyst-adsorbed n-type silicon wafer to grow carbon nanotubes on the entire outer walls of the nanorods or on the entire inner walls of the nanoholes of the metal catalyst-adsorbed n-type silicon wafer to form a plurality of carbon nanotube bridges between two adjacent nanorods or horizontally inside the nanoholes to thereby form a three-dimensional carbon nanotube network structure between the nanorods or inside the nanoholes.