Structure and method for high performance multi-port inductor
AssigneeGlobalfoundries Inc.
InventorsShyam Parthasarathy, Venkata Narayana Rao Vanukuru, Randy Lee Wolf
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AssigneeGlobalfoundries Inc.
InventorsShyam Parthasarathy, Venkata Narayana Rao Vanukuru, Randy Lee Wolf
Estimating the term…
A multi-port inductor structure for use in semiconductor applications such as high-performance RF filters and amplifiers is provided. Embodiments of the present invention may provide 3 metallization layers and two via layers. The metallization layers and via layers may be substantially stacked on top of each other to conserve space. Each metallization layer comprises a ring pattern. In embodiments, the top two ring patterns include a plurality of concentric bands, forming a spiral pattern. The third (bottom) ring may include a broken ring pattern. In embodiments, the second (middle) ring may include one or more spans to facilitate connection to the inner bands of the second ring. The spans connect inner bands to an outer perimeter region of the second ring. Multiple tap points along the bands and spans allow multiple inductance values to be obtained from the structure.
A multi-port inductor structure, comprising:
A multi-port inductor structure, comprising:
A multi-port inductor structure, comprising:
Dependencies are inferred from the claim text.