Annular cooling fluid passage for magnets
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsScott Barraclough, James S. Buff
Life of this patent
Estimating the term…
Abstract
A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. Each of the first and second magnets including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, each annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.
Claims11
A magnet comprising:
- a metal core having a cavity therein;
- a plurality of conductive wire wraps disposed around the metal core to shape an ion beam produced by an ion source of an ion implant apparatus;
- and
- an annular core element configured to be received within the cavity, the annular core element configured to form an annular coolant fluid passage between the cavity and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in a middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening, and wherein the external coolant fluid opening is a first external coolant fluid opening and the internal coolant fluid opening is a first internal coolant fluid opening, and the annular core has a second external coolant fluid opening, a second internal coolant fluid opening disposed in the middle section, and a second internal coolant fluid passage connecting the second external coolant fluid opening and the second internal coolant fluid opening.
A magnet for use with an ion implant apparatus, the magnet comprising:
- an ion beam coupling having an aperture disposed there through;
- a first magnet disposed adjacent to the ion beam coupling;
- and
- a second magnet disposed adjacent to the ion beam coupling and the first magnet, each of the first and second magnets including:
- a metal core having a cavity therein;
- a plurality of conductive wire wraps disposed around the metal core;
- and
- an annular core element configured to be received within the cavity, the annular core element configured to form an annular coolant fluid passage between the metal core and the annular core element, wherein the annular core element has a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in the middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening, and wherein the external coolant fluid opening is a first external coolant fluid opening and the internal coolant fluid opening is a first internal coolant fluid opening, and the annular core has a second external coolant fluid opening, a second internal coolant fluid opening disposed in the middle section, and a second internal coolant fluid passage connecting the second external coolant fluid opening and the second internal coolant fluid opening.
Dependencies are inferred from the claim text.