Scintillator panel and method for manufacturing scintillator panel
AssigneeToray Industries, Inc.
InventorsYuichiro Iguchi, Tsubasa Hamano, Yasuhiro Kobayashi
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Abstract
A scintillator panel including: a plate-like substrate; a grid-like barrier rib provided on the substrate; and a scintillator layer composed of a phosphor filled in cells divided by the barrier rib, wherein the barrier rib is formed of a material which is mainly composed of a low-melting-point glass containing 2 to 20% by mass of an alkali metal oxide. The scintillator panel is provided with a narrow barrier rib with high accuracy in a large area, and the scintillator panel has high luminous efficiency, and provides sharp images.
Claims11
A scintillator panel comprising:
- a plate-like substrate;
- a grid-like barrier rib provided on the substrate;
- and a scintillator layer composed of a phosphor filled in cells divided by the barrier rib, wherein the barrier rib is formed of a material which is mainly composed of a low-melting-point glass containing 2 to 20% by mass of an alkali metal oxide, wherein the barrier rib has a height of 250 to 500 μm.
A method for manufacturing a barrier rib member having a plate-like substrate, and a grid-like barrier rib provided on the substrate, the method comprising:
- a step of forming a photosensitive paste coating film by applying onto a substrate a photosensitive paste which contains a low-melting-point glass powder containing 2 to 20% by mass of an alkali metal oxide, and a photosensitive organic component;
- a step of exposing the obtained photosensitive paste coating film to light through a photomask having a predetermined opening;
- a development step of dissolving and removing a part of the exposed photosensitive paste coating film which is soluble in a developer to obtain a photosensitive paste coating film pattern;
- and
- a firing step of heating the photosensitive paste coating film pattern after development to 500° C. to 700° C. to remove the organic component and soften and sinter the low-melting-point glass and thereby forming a barrier rib, wherein the barrier rib has a height of 250 to 500 μm.
A method for manufacturing a scintillator panel comprising a plate-like substrate, a grid-like barrier rib provided on the substrate, and a scintillator layer composed of a phosphor filled in cells divided by the barrier rib, the method comprising:
- a step of forming a photosensitive paste coating film by applying onto a substrate a photosensitive paste which contains a low-melting-point glass powder containing 2 to 20% by mass of an alkali metal oxide, and a photosensitive organic component;
- a step of exposing the obtained photosensitive paste coating film to light through a photomask having a predetermined opening;
- a development step of dissolving and removing a part of the exposed photosensitive paste coating film which is soluble in a developer to obtain a photosensitive paste coating film pattern;
- a firing step of heating the photosensitive paste coating film pattern after development to 500° C. to 700° C. to remove the organic component and soften and sinter the low-melting-point glass and thereby forming a barrier rib, wherein the barrier rib has a height of 250 to 500 μm;
- and
- a step of filling a phosphor in cells divided by the barrier rib.
A method for manufacturing a scintillator panel comprising a plate-like substrate, a buffer layer provided on the substrate, a grid-like barrier rib provided on the buffer layer, and a scintillator layer composed of a phosphor filled in cells divided by the barrier rib, the method comprising:
- a step of forming a buffer layer paste coating film by applying onto a substrate a buffer layer paste which contains an inorganic powder selected from a low-melting-point glass powder and a ceramic powder, and a photosensitive organic component;
- a step of exposing the entire surface of the buffer layer paste coating film to light;
- a step of forming a barrier rib photosensitive paste coating film by applying onto the exposed buffer layer paste coating film a barrier rib photosensitive paste which contains a low-melting-point glass powder containing 2 to 20% by mass of an alkali metal oxide, and a photosensitive organic component;
- a step of exposing the obtained barrier rib photosensitive paste coating film to light through a photomask having a predetermined opening;
- a development step of dissolving and removing a part of the exposed photosensitive paste coating film which is soluble in a developer to obtain a photosensitive paste coating film pattern;
- a firing step of heating the buffer layer paste coating film and the photosensitive paste coating film pattern after development to 500° C. to 700° C. to remove the organic component and soften and sinter the low-melting-point glass and thereby forming a buffer layer and a barrier rib at the same time, wherein the barrier rib has a height of 250 to 500 μm;
- and
- a step of filling a phosphor in cells divided by the barrier rib.
Dependencies are inferred from the claim text.