US 9,177,588 B2Granted

Recessed IRMN reader process

AssigneeHGST Netherlands B.V.

InventorsJames Mac Freitag, Ying Hong, Cherngye Hwang, Stefan Maat, Masaya Nishioka, David John Seagle, Hicham Moulay Sougrati, Shuxia Wang, Yi Zheng, Honglin Zhu

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Abstract

The embodiments of the present invention relate to a method for forming a magnetic read head with pinned layers extending to the ABS of the read head and magnetically coupled with an antiferromagnetic layer that is recessed in relation to the ABS of the read head. Portions of the antiferromagnetic layer and a magnetic layer that are extending to the ABS are removed, exposing a shield. A shielding material is formed on the exposed shield and a seed layer is formed on the shield and on or over a portion of the remaining antiferromagnetic layer. A pinned layer structure is formed on the seed layer and the magnetic layer.

Claims20

Dependent claims

A method for forming a magnetic read head, comprising:

depositing an antiferromagnetic layer over a first shield;
depositing a first magnetic layer over the antiferromagnetic layer, wherein the first shield, the antiferromagnetic layer and the first magnetic layer have a first portion extending to an air bearing surface (ABS);
removing the first portion of the magnetic layer and the first portion of the antiferromagnetic layer to expose the first portion of the first shield, wherein the magnetic layer and the antiferromagnetic layer are recessed from the ABS by a distance;
depositing a shielding material over the first portion of the first shield;
removing a portion of the shielding material and a second portion of the first magnetic layer to expose a second portion of the antiferromagnetic layer;
depositing a seed layer over the shielding material and the second portion of the antiferromagnetic layer;
depositing a pinned layer structure over the seed layer and a third portion of the first magnetic layer;
depositing a tunnel barrier or spacer layer over the pinned layer structure;
and
depositing a free layer over the tunnel barrier or spacer layer.

7 more elements

A method for forming a magnetic read head, comprising:

depositing a first seed layer on a first shield;
depositing an antiferromagnetic layer on the first seed layer;
depositing a first magnetic layer on the antiferromagnetic layer;
depositing a capping layer on the first magnetic layer;
depositing a diamond like carbon layer on the capping layer, wherein the first shield, the antiferromagnetic layer, the first magnetic layer, the capping layer and the diamond like carbon layer have a first portion extending to an air bearing surface (ABS);
removing the first portion of the first seed layer, the first portion of the antiferromagnetic layer, the first portion of the first magnetic layer, the first portion of the capping layer and the first portion of the diamond like carbon layer to expose the first portion of the first shield, wherein the first seed layer, the antiferromagnetic layer, the magnetic layer, the capping layer and the diamond like carbon layer are recessed from the ABS by a distance;
depositing a shielding material on the first portion of the first shield;
removing a portion of the shielding material and a second portion of the first magnetic layer so the remaining first magnetic layer has a third portion having a first thickness and a fourth portion having a second thickness, wherein the second thickness is greater than the first thickness;
depositing a second seed layer on the shielding material and the third portion of the first magnetic layer;
depositing a pinned layer structure on the first seed layer and the fourth portion of the first magnetic layer;
depositing a tunnel barrier or spacer layer on the pinned layer structure;
and
depositing a free layer on the tunnel barrier or spacer layer.

10 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/158,552Filed 17 Jan 2014
Published: US 2015/0206550 A123 Jul 2015
Granted: 3 Nov 2015
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

G11B 5/85
Processes or apparatus specially adapted for manufacturing record carriers: coating a support with a magnetic layer by vapour deposition
G11B 5/11
Structure or manufacture of housings or shields for heads: shielding of head against electric or magnetic fields
G11B 5/3912
Details related to the use of magnetic thin film layers or to their effects: arrangements in which the active read-out elements are transducing in…
G11B 5/398
Using magnetic thin film layers or their effects, the films being part of integrated structures: specially shaped layers