Magnetic recording medium fabrication method and apparatus
AssigneeShowa Denko K.K.
InventorsTakehiko Okabe, Katsuaki To
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Abstract
A method of fabricating a magnetic recording medium by sequentially forming a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body, includes forming the lubricant by depositing a first lubricant on the stacked body after forming the protection layer, by vapor-phase lubrication deposition, without exposing the stacked body to atmosphere, and depositing a second lubricant on the stacked body after depositing the first lubricant, by vapor-phase lubrication deposition, without exposing the stacked body to atmosphere.
Claims12
A method of fabricating a magnetic recording medium by sequentially forming a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body, comprising:
- forming the lubricant,
- wherein the forming the lubricant includes
- depositing a first lubricant on the stacked body in a first process chamber after forming the protection layer, by vapor-phase lubrication deposition, without exposing the stacked body to atmosphere;
- and
- depositing a second lubricant on the stacked body in a second process chamber that is different from the first process chamber after depositing the first lubricant, by vapor-phase lubrication deposition, without exposing the stacked body to atmosphere.
Dependencies are inferred from the claim text.