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AssigneeASML Netherlands B.V.
InventorsWim Tjibbo Tel, Wouter Onno Pril, Thomas Theeuwes, Alexander Viktorovych Padiy
Estimating the term…
A lithographic apparatus is calibrated by reference to a primary reference substrate. Using an apparatus which need not be the same as the one being calibrated, there is obtained an apparatus-specific fingerprint of the primary reference substrate. Using the same set-up there is then obtained an apparatus-specific fingerprint of a secondary reference substrate. The apparatus-specific fingerprint of the primary reference substrate is subtracted from the apparatus-specific fingerprint of the secondary reference substrate to obtain and store an apparatus-independent fingerprint of the secondary reference substrate. The secondary reference substrate and stored apparatus-independent fingerprint are subsequently used together in place of the primary reference substrate as a reference for the calibration of the lithographic apparatus to be calibrated. Initial set-up for a cluster of lithographic tools can be performed with less use of the costly primary reference substrate, and with less interruption to normal production. The initial set-up can be integrated with on-going monitoring and re-calibration of the apparatuses.
A method of calibrating a lithographic apparatus, the lithographic apparatus, comprising a support for a substrate a patterning subsystem for applying a pattern to the substrate, a measurement subsystem for measuring features on the substrate and a positioning subsystem for controlling the support and the patterning subsystem so as to apply the pattern at a desired position on the substrate, the accuracy of applying the pattern being dependent upon use of calibration data for correcting apparatus-specific deviations in the performance of the lithographic apparatus across the substrate, the method comprising:
An apparatus comprising:
An article of manufacture including a non-transitory computer-readable storage medium having instructions stored there on that, in response to execution by a computing device, cause the computing device to perform operations comprising:
Dependencies are inferred from the claim text.