Lithography methods, methods for forming patterning tools and patterning tools
AssigneeMicron Technology, Inc.
InventorsJianming Zhou, Scott L. Light, David Kewley, Prasanna Srinivasan, Anton deVilliers
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Abstract
Methods of lithography, methods for forming patterning tools, and patterning tools are described. One such patterning tool include an active region that forms a first diffraction image on a lens when in use, and an inactive region that forms a second diffraction image on a lens when in use. The inactive region includes a pattern of phase shifting features formed in a substantially transparent material of the patterning tool. Patterning tools and methods, as described, can be used to compensate for lens distortion from effects such as localized heating.
Claims19
A method, comprising:
- transmitting energy through a first region of a patterning tool, forming a first diffraction image on a lens while forming a pattern of features on a working surface;
- transmitting energy through a second region of the patterning tool, forming a second diffraction image on the lens, wherein the second region of the patterning tool includes a pattern of features that are formed in a substantially transparent material of the patterning tool;
- wherein lens distortion from local heating of the lens due to the first diffraction image is at least partially compensated by local heating of the lens due to the second diffraction image.
A method, comprising:
- transmitting energy through a first region of a patterning tool, forming a first diffraction image on a lens while forming a pattern of features on a working surface;
- transmitting energy through a second region of the patterning tool that transmits more energy than the first region of the pattering tool, forming a second diffraction image on the lens;
- wherein lens distortion from local heating of the lens due to the first diffraction image is at least partially compensated by local heating of the lens due to the second diffraction image.
Dependencies are inferred from the claim text.