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US 9,176,378 B2Granted
Resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKoji Ichikawa, Takahiro Yasue, Satoshi Yamaguchi
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Abstract
A resist composition of the invention includes: (A) a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid, (B) an acid generator represented by the formula (II), and (D) a compound represented by the formula (I), wherein R1, R2, m, n, Q1, Q2, L1, ring W1 and Z+ are defined in the specification.
Claims4
A resist composition comprising
- (A) a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid,
- (B) an acid generator represented by the formula (II), and
- (D) a compound represented by the formula (I),
- wherein R1 and R2 in each occurrence independently represent a C1 to C12 hydrocarbon group, a C1 to C6 alkoxyl group, a C2 to C7 acyl group, a C2 to C7 acyloxy group, a C2 to C7 alkoxycarbonyl group, a nitro group or a halogen atom;
- m and n independently represent an integer of 0 to 4;
- wherein Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group;
- L1 represents *—CO—O-La- or *—CH2—O-Lb-, * represents a bond to —CQ1Q2, La and Lb independently represent a C1 to C15 divalent saturated hydrocarbon group, and one or more —CH2-contained in the divalent hydrocarbon group may be replaced by —O— or —CO—;
- ring W1 represents a C2 to C36 heterocyclic ring;
- Z+ represents an organic cation;
- and
- which further comprises a solvent.
8 more elements
Dependencies are inferred from the claim text.