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US 9,176,299 B2Granted
Monolithic optical components with integrated flexures
AssigneeZygo Corporation
InventorMark Bremer
Life of this patent
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Abstract
An optical element includes a monolithic body portion, the monolithic body portion having an inner body portion, an outer body portion extending at least partially around the inner body portion, and exactly three flexural hinges connecting the inner body portion to the outer body portion. One of the inner body portion and the outer body portion defines an optical active portion configured to reflect, refract, or diffract light, and the other of the inner body portion and outer body portion defines a mount portion.
Claims25
An optical element comprising a monolithic body portion, the monolithic body portion comprising:
- an inner body portion;
- an outer body portion extending at least partially around the inner body portion;
- and
- exactly three flexural hinges connecting the inner body portion to the outer body portion,
- wherein one of the inner body portion and the outer body portion defines an optically active portion configured to reflect, refract, or diffract light, and the other of the inner body portion and the outer body portion defines a mount portion, and
- wherein the outer body portion comprises a shelf portion integrally coupled to a first hinge of the three flexural hinges and/or the inner body portion comprises an overhang portion integrally coupled to the first hinge of the three flexural hinges.
3 more elements
Dependencies are inferred from the claim text.