TMR magnetic sensor including a conductive material and a passivation film and manufacturing method therefor
AssigneeMitsubishi Electric Corporation
InventorsSatoi Kobayashi, Takaki Sugino
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AssigneeMitsubishi Electric Corporation
InventorsSatoi Kobayashi, Takaki Sugino
Estimating the term…
A tunnel magneto-resistance (TMR) magnetic sensor and its manufacturing method are provided in which its degradation of the degree of accuracy of angle detection or the like is not caused due to an electrical discharge current by static electricity. The TMR magnetic sensor includes a TMR sensor element formed on a first face of a substrate with an insulation film interposing therebetween; a conductive material formed on the first face of the substrate, being electrically connected to the substrate; and a passivation film surrounding a surface of the TMR sensor element and that of the conductive material, wherein at least a portion of the conductive material faces toward an opening portion formed in the passivation film.
A TMR magnetic sensor comprising:
Dependencies are inferred from the claim text.