Probe and method of manufacture for semiconductor wafer characterization
AssigneeBruker Nano, Inc.
InventorsDong Chen, Mark Munch
Life of this patent
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Abstract
A conductive probe for semiconductor material characterization includes a distal metallic layer of micrometer-size particles, an intermediate layer of conformable conductive elastomer material, and a pin attached to the elastomer layer. The probe is preferably manufactured by filling a recess in a bottom plate with the metallic particles, coupling a top plate thereto with a perforation aligned with the recess, and filling the perforation with uncured conductive elastomer. The pin, preferably spring-loaded, is pressed into the perforation to compress the silicone to its intended probe size. The silicone is then allowed to cure at room temperature or in a heated environment, or both.
Claims20
A conductive probe for characterizing a semiconductor material, comprising:
- a conductive pin adapted for mechanical and electrical connection with semiconductor-material testing apparatus;
- a layer of conductive elastomer attached to a distal end of the pin;
- and
- a separate and distinct layer of conductive particles adhered to a top surface of the layer of conductive elastomer.
A process for making a probe for characterizing a semiconductor material, comprising the following steps:
- depositing a layer of conductive particles on a supporting fixture, said layer being free of conductive elastomer;
- placing a separate and distinct layer of uncured conductive elastomer over said layer of conductive particles;
- placing a conductive pin over said layer of conductive elastomer;
- and
- curing the conductive elastomer.
A process for making a probe for characterizing a semiconductor material, comprising the following steps:
- placing a layer of uncured conductive elastomer over a conductive pin held in a mold;
- depositing a separate and distinct layer of conductive particles over a top surface of said layer of uncured conductive elastomer in the mold;
- curing the conductive elastomer;
- and
- removing the pin from the mold.
Dependencies are inferred from the claim text.