Back to results
US 9,176,065 B2Granted
Nanoscale array structures suitable for surface enhanced raman scattering and methods related thereto
AssigneesLawrence Livermore National Security, LLC, The Board of Trustees of the University of Illinois
InventorsTiziana C. Bond, Robin Miles, James C. Davidson, Gang Logan Liu
Life of this patent
Estimating the term…
Abstract
Methods for fabricating nanoscale array structures suitable for surface enhanced Raman scattering, structures thus obtained, and methods to characterize the nanoscale array structures suitable for surface enhanced Raman scattering. Nanoscale array structures may comprise nanotrees, nanorecesses and tapered nanopillars.
Claims30
A structure comprising:
- a planar substrate;
- an array of nanopillars on the planar substrate, the array of nanopillars substantially perpendicular to the planar substrate and having a substantially cylindrical shape;
- a metal drop comprising a first metal and a second metal, the metal drop having a substantially spherical shape, the second metal of the metal drop uniformly covering the first metal of the metal drop on each nanopillar of the array of nanopillars, wherein
- the second metal further covers a surface of the planar substrate with a layer having a uniform thickness;
- and
- a dielectric material covering and filling a region between adjacent metal drops and between adjacent nanopillars.
3 more elements
A structure comprising:
- a planar substrate;
- an array of nanorecesses in the planar substrate;
- a first metal covering the planar substrate and the array of nanorecesses, the first metal covering the planar substrate with a layer having a uniform thickness;
- and
- a dielectric material covering and filling the nanorecesses.
2 more elements
A structure comprising:
- a planar substrate;
- an array of tapered nanopillars on the planar substrate, wherein each tapered nanopillar of the array of tapered nanopillars is substantially perpendicular to the planar substrate and have a substantially conical shape, the conical shape being wider on a side connected with the planar substrate and tapered on a side opposite the planar substrate;
- a metal layer covering a surface of the planar substrate and covering each tapered nanopillar of the array of tapered nanopillars, said metal layer covering the surface of the planar substrate with uniform thickness;
- and
- a dielectric material covering and filling in between the tapered nanopillars.
2 more elements
A structure comprising:
- a planar substrate;
- an array of straight nanopillars on the planar substrate, wherein each straight nanopillar of the array of straight nanopillars is substantially perpendicular to the planar substrate and has a substantially cylindrical shape;
- a metal layer covering a surface of the planar substrate and covering each straight nanopillar of the array of straight nanopillars, said metal layer covering the surface of the planar substrate with uniform thickness;
- and
- a dielectric material covering and filling in between the straight nanopillars.
2 more elements
A structure comprising:
- a planar substrate;
- an array of nanopillars on the planar substrate, the array of nanopillars substantially perpendicular to the planar substrate and having a substantially cylindrical shape;
- and
- a metal drop comprising a metal, the metal drop having a substantially spherical shape formed on each nanopillar of the array of nanopillars,
- wherein the metal further covers a surface of the planar substrate with a layer having a uniform thickness, and
- wherein the lateral area of each nanopillar is partially covered by the metal.
3 more elements
Dependencies are inferred from the claim text.