Normal incidence broadband spectroscopic polarimeter and optical measurement system
AssigneeBeioptics Technology Co., Ltd
InventorsGuoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Xiaolang Yan
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AssigneeBeioptics Technology Co., Ltd
InventorsGuoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Xiaolang Yan
Estimating the term…
A kind of normal incidence broadband spectroscopic polarimeter which is easy to adjust the focus, has no chromatic aberration, maintains the polarization and has simple structure. The normal incidence broadband spectroscopic polarimeter can make the probe beam normal incidence and focus on the sample surface by using at least one flat reflector element to change propagation direction of the focused beam. Moreover, the normal incidence broadband spectroscopic polarimeter contains at least one polarizer as to measure the anisotropy or non-uniform samples, such as three-dimensional profile and material optical constants of thin films consisting of the periodic structure. An optical measurement system including the normal incidence broadband spectroscopic polarimeter is also provided.
A normal incidence broadband spectroscopic polarimeter comprising a light source, a beam splitting element, a focusing unit, a polarizer, a first curved reflector element, a first flat reflector element and a detection unit, wherein:
An optical measurement system, comprising a normal incidence broadband spectroscopic polarimeter, comprising a light source, a beam splitting element, a focusing unit, a polarizer, a first curved reflector element, a first flat reflector element and a detection unit, wherein:
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