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US 9,176,030 B2Granted
Substrate and target plate
AssigneeSONY DADC Austria AG
InventorsIvan Lucic, Peter Hausberger, Werner Balika, Christian Poeschl
Life of this patent
Estimating the term…
Abstract
A substrate is provided, which comprises a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, wherein at least two dimensions are between 1 nm and 100 μm, the structured surface being configured to stimulate smooth crystallization of microcrystals or to boost hydrophobic properties. A target plate comprising a plurality of substrates is disclosed as well.
Claims25
A substrate comprising:
- a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, the structured surface being configured to stimulate crystallization of microcrystals, wherein
- at least two dimensions of the elevated structures are between 1 nm and 100 μm,
- a basic unit of the regular pattern includes a first elevated structure which is elongated along a first direction in parallel to the nominal surface and which includes a first cross-section perpendicular to the first direction and the regular pattern further includes a second elevated structure, which is elongated along the first direction and which includes a second cross-section perpendicular to the first direction, such that the second cross-section is smaller than the first cross-section,
- a height of the first cross-section perpendicular to the nominal surface is different from a height of the second cross-section perpendicular to the nominal surface,
- in the regular pattern, a first distance between the first elevated structure and the second elevated structure is different from a second distance between the second elevated structure and a next first elevated structure, the first distance being half the second distance so as to stimulate crystallization of the microcrystals, and
- the first distance and the second distance are determined based on at least one of a size, crystallization form, and shape of the microcrystals.
3 more elements
A substrate comprising:
- a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, the structured surface being configured to stimulate crystallization of microcrystals, wherein
- at least two dimensions of the elevated structures are between 1 nm and 100 μm,
- a basic unit of the regular pattern includes a first elevated structure which is elongated along a first direction in parallel to the nominal surface and which includes a first cross-section perpendicular to the first direction and the regular pattern further includes a second elevated structure, which is elongated along the first direction and which includes a second cross-section perpendicular to the first direction, such that the second cross-section is smaller than the first cross-section,
- areas of the first and second cross-sections are essentially equal throughout each respective elevated structure,
- a height of the first cross-section perpendicular to the nominal surface is different from a height of the second cross-section perpendicular to the nominal surface,
- in the regular pattern, a first spacing between the first elevated structure and the second elevated structure is different from a second spacing between the second elevated structure and a next first elevated structure, the first spacing being half of the second spacing so as to stimulate crystallization of the microcrystals, and
- the first spacing and the second spacing are determined based on at least one of a size, crystallization form, and shape of the microcrystals.
4 more elements
A substrate comprising:
- a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, the structured surface being configured to stimulate crystallization of microcrystals, wherein
- at least two dimensions of the elevated structures are between 1 nm and 100 μm,
- a basic unit of the regular pattern includes a first elevated structure with a first volume and a second elevated structure with a second volume, the second volume being smaller than the first volume,
- a height of the first elevated structure perpendicular to the nominal surface is different from a height of the second elevated structure perpendicular to the nominal surface,
- in the regular pattern, a first spacing between the first elevated structure and the second elevated structure is different from a second spacing between the second elevated structure and a next first elevated structure, the first spacing being half of the second spacing so as to stimulate crystallization of the microcrystals, and
- the first spacing and the second spacing are determined based on at least one of a size, crystallization form, and shape of the microcrystals.
3 more elements
Dependencies are inferred from the claim text.