Pressure sensor having multiple pressure cells and sensitivity estimation methodology

A device comprising:

• a pressure sensor, said pressure sensor including:
• a sense cell having a first electrode formed on a substrate and a sense diaphragm overlying and spaced apart from said first electrode to produce a sense cavity, said sense cell being configured to produce a first sense signal in response to pressure;
• a test cell having a second electrode formed on said substrate and a test diaphragm overlying and spaced apart from said second electrode to produce a test cavity, said test cell being configured to produce a second sense signal in response to said pressure, wherein a first sensitivity of said sense cell to said pressure is less than a second sensitivity of said test cell to said pressure and a value of said second sensitivity is utilized to estimate a value of said first sensitivity;
• and
• a reference cell, said reference cell including a third electrode formed on said substrate, a reference diaphragm overlying and spaced apart from said third electrode to produce a reference cavity, and a cap layer over said reference diaphragm, said cap layer making said reference cell insensitive to said pressure.