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US 9,176,013 B2Granted
Sensor, electronic apparatus, robot, and mobile object
AssigneeSeiko Epson Corporation
InventorsShogo Inaba, Kyo Horie
Life of this patent
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Abstract
A sensor includes a flexible wafer substrate and an oscillator provided on a principal surface of the wafer substrate, and the oscillator deforms when an external force is applied to the wafer substrate.
Claims17
A sensor comprising:
- a flexible substrate;
- and
- a resonator provided above a principal surface of the substrate, wherein the resonator includes:
- a first electrode disposed above the principal surface of the substrate, and
- a second electrode spaced apart from the first electrode and having an area that overlaps with the first electrode in a plan view, wherein
- the resonator is deformable when an external force is applied to the substrate,
- the sensor includes a plurality of resonators, and
- the plurality of resonators are disposed so that extension directions in which each area where the first electrode and the second electrode overlap are oriented in different directions along the principal surface of the substrate in the plan view.
5 more elements
A sensor comprising:
- a flexible substrate;
- a resonator provided above a principal surface of the substrate;
- a frequency detection circuit that detects a resonance frequency of the resonator;
- and
- a storage section that stores at least one of the resonance frequency detected by the frequency detection circuit, a change amount in the resonance frequency, a maximum and a minimum of the resonance frequency, and a maximum and a minimum of the change amount in the resonance frequency, wherein
- the resonator is deformable when an external force is applied to the substrate.
3 more elements
A sensor comprising:
- a flexible substrate;
- and
- a resonator provided above a principal surface of the substrate, wherein the resonator includes:
- a first electrode disposed above the principal surface of the substrate;
- and
- a second electrode disposed above the first electrode, the second electrode being spaced apart from the first electrode with an air gap, wherein
- the resonator is deformable when an external force is applied to the substrate, and
- the first electrode and the second electrode are partially overlapped with each other in a plan view.
5 more elements
Dependencies are inferred from the claim text.