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US 9,176,009 B2Granted
Terahertz imager
AssigneeSTMicroelectronics S.r.l.
InventorsHani Sherry, Andreia Cathelin, Andreas Kaiser, Ullrich Pfeiffer, Janusz Grzyb, Yan Zhao
Life of this patent
Estimating the term…
Abstract
A terahertz imager includes an array of pixel circuits. Each pixel circuit has an antenna and a detector. The detector is coupled to differential output terminals of the antenna. A frequency oscillator is configured to generate a frequency signal on an output line. The output line is coupled to an input terminal of the antenna of at least one of the pixel circuits.
Claims26
A terahertz imager comprising:
- an array of pixel circuits, each pixel circuit having an antenna and a detector that is coupled to differential output terminals of the antenna;
- and
- a frequency oscillator comprising a ring oscillator having a plurality of inverters, wherein the frequency oscillator is configured to generate a frequency signal on an output line, the output line being coupled to an input terminal of the antenna of at least one of the pixel circuits, and wherein
- the frequency signal is at a frequency in the range of 300 GHz to 3 THz, and
- each inverter of the plurality inverters comprises a transistor having a gate length of 65 nm or smaller.
2 more elements
A terahertz imager comprising:
- an array of pixel circuits, each pixel circuit having an antenna and a detector that is coupled to differential output terminals of the antenna;
- and
- a frequency oscillator configured to generate a frequency signal on an output line, the output line being coupled to an input terminal of the antenna of at least one of the pixel circuits, wherein the frequency oscillator comprises:
- a first transistor having a source, a drain and a gate, the first transistor having a gate length of 65 nm or smaller, the gate of the first transistor being coupled to a drain of an Nth transistor, where N is an odd integer equal to three or more;
- a second transistor having a source, a drain and a gate, the second transistor having a gate length of 65 nm or smaller, the gate of the second transistor being coupled to the drain of the first transistor;
- a third transistor having a source, a drain and a gate, the third transistor having a gate length of 65 nm or smaller, the gate of the third transistor being coupled to the drain of the second transistor;
- a first inductor coupled between the drain of the first transistor and an output line;
- a second inductor coupled between the drain of the second transistor and the output line;
- and
- a third inductor coupled between the drain of the third transistor and the output line;
- wherein the frequency oscillator is configured to carry an output frequency signal having a frequency in the range of 300 GHz to 3 THz at the output line.
8 more elements
A terahertz imager comprising:
- an array of pixel circuits, each pixel circuit having an antenna and a detector that is coupled to differential output terminals of the antenna;
- and
- a frequency oscillator configured to generate a frequency signal on an output line, the output line being coupled to an input terminal of the antenna of at least one of the pixel circuits, wherein the frequency oscillator comprises a first ring oscillator formed of an odd number N of inverters coupled in series, N being equal to three or more, wherein an output from a first of the inverters is coupled to the output line of the frequency oscillator via a first filter and an output from a second of the inverters is coupled to the output line of the frequency oscillator via a second filter.
A method of forming a terahertz imager, the method comprising:
- forming a terahertz image sensor comprising a plurality of pixel circuits, wherein forming a pixel circuit of the plurality of pixel circuits comprises:
- forming an antenna of the pixel circuit;
- forming a detector of the pixel circuit;
- coupling the detector to differential output terminals of the antenna;
- and
- coupling an input terminal of the antenna to a first output line of a frequency oscillator;
- and
- forming a terahertz transmission system, wherein forming the terahertz transmission system comprises:
- forming an antenna of the terahertz transmission system;
- forming a detector of the terahertz transmission system;
- coupling the detector of the terahertz transmission system to differential output terminals of the antenna of the terahertz transmission system;
- and
- coupling an input terminal of the antenna of the terahertz transmission system to a second output line of the frequency oscillator.
10 more elements
Dependencies are inferred from the claim text.