Contact displacement meter
AssigneeKeyence Corporation
InventorMasaaki Katsurada
Life of this patent
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AssigneeKeyence Corporation
InventorMasaaki Katsurada
Estimating the term…
A light-projecting unit irradiates a scale with non-parallel light. The non-parallel light having passed through a plurality of slits on the scale is received by a light-receiving unit, and a light reception signal indicating a light-receiving amount distribution is outputted. Based on the light reception signal, a plurality of positions where a light-receiving amount is at maximum or minimum in the light-receiving amount distribution on the light-receiving unit are detected as a plurality of peak positions. Based on correction information and the detected plurality of peak positions, a distance between a reference position and a position of at least one slit corresponding to at least one detected peak position is calculated. The correction information shows a relation of a distance between a plurality of peak positions and a distance between a plurality of slits on the scale which respectively correspond to the plurality of peak positions.
A contact displacement meter comprising:
Dependencies are inferred from the claim text.