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US 9,175,908 B2Granted
Lamphead atmosphere
AssigneeApplied Materials, Inc.
InventorJoseph M. Ranish
Life of this patent
Estimating the term…
Abstract
A method and apparatus for thermal processing of semiconductor substrates is disclosed. Each lamp of a lamp assembly is immersed in a thermally conductive atmosphere comprising oxygen. As the lamps are operated, the oxygen reacts with carbon containing species. Consumed oxygen is replaced over time until the thermal conductivity of the atmosphere falls below a tolerance threshold. The atmosphere is then evacuated and replaced.
Claims8
A method of operating a process lamp, comprising:
- immersing the lamp in a recess within a lamp assembly, the recess having an operating atmosphere comprising between about 1% and about 25% of an oxidizing gas, wherein a line is configured to couple air into the recess though an opening in the lamp assembly, and wherein the immersing the lamp in an operating atmosphere comprises evacuating a chamber containing the lamp, pumping helium into the chamber to a first pressure of about 15 Torr or less, pumping the oxidizing gas into the chamber to a second pressure above the first pressure, and allowing air to leak into the chamber until the chamber pressure is between about 10 Torr and about 25 Torr;
- and oxidizing hydrocarbons in the thermally conductive atmosphere.
A method of operating a process lamp, comprising:
- immersing the lamp in a recess within a lamp assembly, the recess having an operating atmosphere comprising between about 1% and about 25% of an oxidizing gas, wherein a line is configured to couple air into the recess though an opening in the lamp assembly, wherein the immersing the lamp comprises evacuating a chamber containing the lamp, filling the chamber with helium, and adding the oxidizing gas to the helium in the chamber, and wherein the removing and replacing the operating atmosphere comprises reducing the pressure in the chamber to a third pressure below about 1 Torr, pumping helium into the chamber to a fourth pressure of about 15 Torr or less, and pumping the oxidizing gas into the chamber to a fifth pressure above the fourth pressure;
- and oxidizing hydrocarbons in the thermally conductive atmosphere.
A method of operating a lamp, comprising:
- establishing a thermally conductive atmosphere comprising oxygen and helium surrounding the lamp at a first pressure of about 15 Torr or less, wherein a line is configured to couple air into the thermally conductive atmosphere though an opening, and wherein the establishing comprises providing a gas selected from the group consisting of O2, O3, and H2 O2;
- leaking air into the thermally conductive atmosphere until the pressure reaches at least about 5 Torr above the first pressure while operating the lamp;
- and
- evacuating the thermally conductive atmosphere to a pressure less than about 1 Torr.
1 more element
Dependencies are inferred from the claim text.