Substrate holder and plating apparatus
AssigneeEbara Corporation
InventorJumpei Fujikata
Life of this patent
Estimating the term…
Abstract
There is provided a substrate holder which can absorb a change in the thickness between substrates and can hold a substrate while preventing deflection of the substrate and keeping the amount of compression of a substrate sealing member within a certain narrow range. The substrate holder includes a first holding member and a second holding member, both for detachably holding a substrate by holding a peripheral portion of the substrate therebetween; and a substrate sealing member, mounted to the second holding member, for sealing the peripheral portion of the substrate along a substrate sealing line. The first holding member has a thickness absorbing mechanism which biases the substrate toward the second holding member at positions along the substrate sealing line.
Claims8
A substrate holder comprising:
- a first holding member and a second holding member, both for detachably holding a substrate by holding a peripheral portion of the substrate therebetween,
- wherein the second holding member has a protruding portion which, when the substrate is held by the first holding member and the second holding member, seals the peripheral portion of the substrate along a substrate sealing line,
- wherein the first holding member has a support base, a movable base provided separately from the support base and having an annular support surface which is able to touch the peripheral portion of the substrate for supporting the substrate,
- wherein a gap is formed between the support base and the moveable base, and a thickness absorbing mechanism which, when the substrate is held by the first holding member and the second holding member, biases the substrate on the annular support surface toward the second holding member at positions along the substrate sealing line in order to absorb a change in the thickness between substrates,
- wherein the thickness absorbing mechanism is disposed between the support base and the movable base, and
- wherein the second holding member is provided with a first contact member for contact with the peripheral portion of the substrate, held between the first holding member and the second holding member, to supply electricity to the substrate, and the support base of the first holding member is provided with a second contact member connected to an external power source to supply electricity to the first contact member.
Dependencies are inferred from the claim text.