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US 9,174,848 B2Granted
Processes and systems for purifying silane
AssigneeSunEdison, Inc.
InventorsBaisheng Zou, Zhihui Gu
Life of this patent
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Abstract
Processes and systems for purifying silane-containing streams and, in particular, for purifying silane-containing streams that also contain ethylene are disclosed. The processes and systems may be arranged such that one or more ethylene reactors are downstream of light-end distillation operations.
Claims10
A process for purifying a silane-containing stream, the stream comprising silane, ethylene and one or more compounds with a boiling point less than silane, the process comprising:
- introducing the silane-containing stream into a reactor to convert ethylene to at least one of ethylsilane and ethane and to produce an ethylene-depleted stream relative to the silane-containing stream;
- and
- introducing the ethylene-depleted stream into a heavy-ends distillation column to produce a silane-enriched overhead fraction and a silane-depleted bottoms fraction relative to the ethylene-depleted stream, the silane-depleted bottoms fraction being enriched in at least one of ethylsilane and ethane relative to the ethylene-depleted stream;
- and
- introducing the overhead fraction produced from the heavy-ends distillation column into a light-ends distillation column to produce a silane-depleted overhead fraction and a silane-enriched bottoms fraction relative to the overhead fraction produced from the heavy-ends distillation column, the silane-depleted overhead fraction being enriched in compounds with a boiling point less than silane relative to the overhead fraction produced from the heavy-ends distillation column.
2 more elements
Dependencies are inferred from the claim text.