Back to results
US 9,174,835 B2Granted
Microstructure and electronic device
AssigneeSTMicroelectronics S.r.l.
InventorMing Fang
Life of this patent
Estimating the term…
Abstract
A method of manufacturing microstructures, such as MEMS or NEMS devices, including forming a protective layer on a surface of a moveable component of the microstructure. For example, a silicide layer may be formed on one or more surfaces of a poly-silicon mass that is moveable with respect to a substrate of the microstructure. The process may be self-aligning.
Claims25
A microstructure, comprising:
- a substrate;
- and
- a component having a coupling element that moveably secures a body of the component to the substrate, the body being formed of a first type of material, the component having a second type of material different from the first type of material positioned on at least a portion of at least four different surfaces of the body, the coupling element having the second type of material overlying a portion of its surface, the second type of material having more electropositive elements than the first type of material.
An electronic device, comprising:
- an integrated circuit;
- and
- a microstructure coupled to the integrated circuit, the microstructure including:
- a substrate;
- a moveable mass having a body formed of a first type of material;
- means for moveably securing the body of the moveable mass to the substrate;
- and
- means for protecting at least a portion of at least four different surfaces of the body of the moveable mass and at least a portion of a surface of the means for moveably securing the moveable mass to the substrate, the means for protecting comprising a second type of material having more electropositive elements than the first type of material.
5 more elements
A system, comprising:
- an integrated circuit;
- and
- a microstructure coupled to the integrated circuit, the microstructure including:
- a substrate;
- and
- a component having a coupling element that moveably secures a body of the component to the substrate, the body being formed of a first type of material, the component having a second type of material different from the first type of material positioned on at least a portion of at least four different surfaces of the body, the coupling element having the second type of material overlying at least a portion its surface, the second type of material having more electropositive elements than the first type of material.
3 more elements
Dependencies are inferred from the claim text.