Method for producing structures in optoelectronic components and device for this purpose
AssigneeOSRAM Opto Semiconductors GmbH
InventorsKarl Engl, Berthold Hahn, Volker Härle
Life of this patent
Estimating the term…
Abstract
A method for producing structures (5) on a multiplicity of optoelectronic components (1), wherein the multiplicity of optoelectronic components (1) are arranged on an auxiliary carrier (10) and the structures (5) are produced by carrying out a movement of a first roller (15) relative to the auxiliary carrier (10) and producing the structures (5) in the process by means of exerting a pressure between the first roller (15) and the auxiliary carrier (10).
Claims24
A method for producing structures on a multiplicity of optoelectronic components arranged on an auxiliary carrier, the method comprising the steps of:
- providing the multiplicity of optoelectronic components, each of the optoelectronic components having an active layer comprising an optoelectronic material arranged on the auxiliary carrier before forming the structures on the multiplicity of optoelectronic components;
- carrying out a relative movement between a first roller and the auxiliary carrier;
- and
- exerting a pressure between the first roller and the auxiliary carrier to form the structures on the multiplicity of optoelectronic components.
A method for producing structures on a multiplicity of optoelectronic components arranged on an auxiliary carrier, the method comprising the steps of:
- carrying out a relative movement between a first roller and the auxiliary carrier, where the auxiliary carrier carries the multiplicity of optoelectronic components before and during the formation of the structures, each of the optoelectronic components having a photoresist layer and an active layer comprising an optoelectronic material;
- exerting a pressure between the first roller and the auxiliary carrier to form the structures on the multiplicity of optoelectronic components wherein the structures are formed in the photoresist layer of each of the optoelectronic components;
- and
- removing the multiplicity of optoelectronic components from the auxiliary carrier.
A method for producing structures on a multiplicity of optoelectronic components arranged on an auxiliary carrier, the method comprising the steps of:
- arranging a wafer assemblage on an auxiliary carrier before forming the structures, wherein the wafer assemblage comprises a plurality of optoelectronic components, each of the optoelectronic components having an active layer comprising an optoelectronic material;
- carrying out a relative movement between a first roller and the auxiliary carrier;
- and
- exerting a pressure between the first roller and the auxiliary carrier to form the structures on the multiplicity of optoelectronic components.
Dependencies are inferred from the claim text.